Photo credit Thor Balkhed

Welcome to our lab

The Täppan Cleanroom at Campus Norrköping of Linköping University is a cleanroom facility tailored for processing of soft functional materials. Here you may find a wide range of equipment allowing possibility to develop, pattern, and characterize advanced soft functional materials and electronic devices of the future.

The Cleanroom Täppan is an open facility for the entire university as well as external users affiliated with academia, research organisations and industry.

If you would like to access The Täppan Cleanroom as a user, you first need the “Cleanroom introduction”. Please, contact us to learn more.

Introduction

The Täppan Cleanroom at Campus Norrköping consists of several different areas in ISO class 6 and 7 (FED STD class 1000 and 10 000), has specifically allocated areas for lithography, evaporation, sputtering, plasma etching, electrochemistry, scanning electron and atomic force microscopy, and electrical/optical characterization. Here you may also find a rubber lab for soft electronics and gloveboxes for performing experiments under nitrogen atmosphere.

The Täppan Cleanroom is part of Wise Additive, a national platform for additive manufacturing (AM). Being the central hub for additive manufacturing research and development at Linköping University, with a focus on printing advanced electronic materials and devices, it hosts WISE Additive Node at Linköping University.

About

Who can get access?

We welcome all users to access the equipment for fundamental research and development in the fields of soft electronics and functional materials. Many Täppan Cleanroom users come from academic research environment, mainly LiU. The lab is also open for the entire academic and industrial materials research community. For inquiries regarding access and accreditation, please, contact Slawomir Braun, slawomir.braun@liu.se  

What is done in the lab? 

Coating and Microfabrication 

High vacuum thermal evaporators are available for the deposition of common metals (Al, Ag, Au, Cr). Metal patterns with resolution down to ~50 µm are achieved with plastic shadow masks made via laser patterning or using a flat-bed cutter. Standard photolithography facilities are available to achieve smaller features of ~1 µm using etching or lift-off techniques.  


Soft patterning 

Plasma enhanced CVD is available to coat insulating layers and the three “Reactive Ion Etching” setups are used to pattern polymeric materials.  


Synthesis and coatings 

Chemical synthesis and ink formulations are carried out inside state-of-the-art fume hoods and nitrogen gloveboxes. Homogenizers, ultrasonic bath sonicators, and high-power probe sonicators are available to attain homogeneous dispersions. The resulting mixtures are deposited in a variety of manners i.e. atomically thin coatings are achieved with two “Langmuir-Blodgett” coaters, programmable spin coaters are used for tens-hundreds of nm coatings, blade coating for µm thick coatings, while electrospinning and freeze-dryers are available to attain free-standing bulks.  


Material characterization 

Surface morphology studies are carried out with optical microscopes, optical & surface profilometers, atomic forces microscopes (AFM), and a scanning electron microscope (SEM). Energy-dispersive X-ray spectroscopy (EDX) capability is available within our SEM system, providing the possibility to assess chemical composition of samples. UV-Vis-NIR, FTIR and ATR are available for absorption studies while dielectric properties are studied with a dielectric spectrometer for films and liquids. 
Climate and Humidity chambers are used for studying materials at temperatures above 0 ⁰C and from dry to wet conditions. Low-temperature vacuum measurements are carried out inside four and six arm cryogenic probe stations with temperature ranges of 10-500K. Complete Thermoelectric (TE) characterization facilities have been developed in-house for thin films and bulk (solid and liquid) materials.  


Device characterization 

Two state-of-the-art Keithley 4200 systems with probe stations are used for diodes, transistors, and complementary circuit analysis. Electrochemical characterization of materials and devices (supercapacitors and batteries) are performed by potentiostats from Gamry and Bio-Logic. 

What kind of equipment is found here?

Here you may find a wide range of equipment allowing possibility to develop, pattern, and characterize advanced soft functional materials and electronic devices of the future. 

For full list of equi​pment, see Equipment and Resources further down on this page.

Where to find us

Täppan Cleanroom, Täppan building, Floor 3, Campus Norrköping, Bedgatan 34, Norrköping  

Contacts

Enquiries about lab use: slawomir.braun@liu.se

Access and new user orientation

Täppan Cleanroom is a complex environment, so good laboratory practice is essential if laboratories are to be safe places in which to work.  

Our open research facility is available to academic research groups, start-ups, and company users. All new users are required to complete mandatory training. It is a pre-requisite for all those who wish to access Täppan Cleanroom as a user. This covers such areas as safety, handling chemicals, proper cleanroom behaviour, and specific information concerning the Täppan Cleanroom.  

For more information, please contact Slawomir Braun, slawomir.braun@liu.se

Fees

See our up-to-date tool rates via the link below

Equipment and Resources

Thin film deposition

  • Thermal metal evaporation systems
  • Vaksis 3M Sputtering
  • Nano-PVD-evaporator
  • Vaksis 2-source thermal PVD evaporator
  • Spin coaters (Laurell-FULL, LITE and for photoresist)
  • Rotary evaporator Buchi Rotavapor R-114
  • Spin coaters
  • Diener parylene coater
  • Electrospinning apparatus
  • Langmuir-Blodgett
  • Lithography

  • Heidelberg µMLA tabletop maskless aligner
  • Mask and Bond aligner “sussi” MA6
  • RC8
  • Spin/Rinse dryers and spinners
  • Dry etching

  • Oxford RIE
  • RIE/Plasma enhanced CVD
  • Septo RIE
  • Surface analysis

  • AFM dimension 3000
  • Zeiss Sigma 500 SEM
  • Optical profilometer
  • AFM Dimension 3100 Veeco
  • AFM Dimension XR
  • Surface profiler “Dektak”
  • Surface Profiler “Dektak XT” Bruker
  • Metrology and Electrochemistry

  • Semiconductor inspection microscope
  • Thin film analyzer
  • UV-Visible Absorption spectrometer
  • Dielectric/Impedance spectrometer
  • Contact angle goniometer
  • Ellipsometer
  • Microhardness tester
  • Free radical analyzer
  • FTIR
  • Keithleys
  • Potentiostats
  • Arbitrary waveform generators
  • 4- & 6- probe cryogenic stations
  • FET stations
  • Kelvin probe
  • Oscilloscope
  • Vertical seebeck-measurement setup
  • SEM Sigma 500
  • Electrochemistry cell
  • Other

  • Pipette Puller
  • Piezo setup
  • Glass cutter and flatbed cutter
  • Gloveboxes and fume hoods
  • Humidity chambers and climate chambers
  • Cold trap cart
  • Freeze dryer
  • Ozone cleaning device
  • MetaQuip Laser engraving machine
  • Homogenizer
  • Vacuum filtration system